Publications on the project |
086 Maghetron deposition of structured TiO2 nanofilms. |
Authors: | A.M.Dobrovolsky. A.A.Goncharov, E.G.Kostin, E.K.Frolova | |
Summary: | Investigation influence of pressure of working gases and lining temperature on nanostructure of besiege layers. | |
Keywords: | magnetron, nanofilm, structured films | |
Edition: | ISSN, PAST №4, (8) | | | 2013,
311-314, |
086 Cylindrical magnetron sputtering synthesis of nanosized anatas films. |
Authors: | A.Goncharov, A.Dobrovolsky, E.Kostsn, I.Petrik, E.Frolova. | |
Summary: | Certainly terms of besiege of layers that have high catalytic activity. | |
Keywords: | anatas, magnetron, nanostructure | |
Edition: | Applied Plasma Science | | | 2013,
9-12, |
086 Optical, structure and photocatalytic properties of nanosized TiO2 films in plusma magnetron sputtering synthesis. |
Authors: | A.Goncharov, A.Dobrovolsky, E.Kostin, I.Petrik, E.Frolova | |
Summary: | First certainly set of electrophysics and gas-dynamics parameters of gas discharge in magnetron of direct-current, that allows to carry out undestructive control of beieging of layers TiO2 in real-time. | |
Keywords: | photocatalys, structure. nanosize, films | |
Edition: | JTF | | | 2014,
98-106, |
086 Structure and photocatalytic properties TiO2 nanofilms реактивний magnetron sputtering synthesis. |
Authors: | A.Goncharov, A.Dobrovolsky, E.Kostin, I.Petrik, E.Frolova | |
Summary: | Describe the reactive deposition of TiO2 nanofilms by inverted gas cylindrical DC magnetron. The obtained samples are characterized by means of ellipsometry, Raman spectroscopy, AFM and optical spectroscopy. The results show that structure, morfology and photocatalytic activity of films vary with the variation of deposition conditions. | |
Keywords: | photokatalyse, nanofilm, magnetron | |
Edition: | MF and NT | | | 2014,
613-632, |
The events in the framework of the project |
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086 Executant:Institute of Physics, Department of Physics and Astronomy, Section Physical, Engineering and Mathematics 3.3. Ion-plasma nanotechnology Purpose:Creation of science-technology development of highly effective ion-plasma devices of new generation for synthesis of nanosize films of metals and them chemistry connection. Providing of highly precise management in the processes of syntesis of function properties of such coverages. Receipt of nanoporous and nanostructured films. Expected results:Release of new product: technology Stage 1:Modernisation and perfection of an experimental vacuum laboratory stand and cylindrical plasma device are to the tasks to the project. Development of design of the new systems for gas fall-over. Stage 2:Creation and working off the system of guided serve of working gases. Working of the process of obtaining nanolayers with the optical monitoring system of parameters of chemically active plasma of cylindrical plasmooptics discharge of magnetron type in real time and with bringing of modem calculable method. Stage 3:Working of process of receipt of nanolayers with the set properties with use of automation system serve of working gas and the modernized optical monitoring. Model chemcally active plasma of cylinder plasmaoptic discharge of magnetron type. Detail study of electrophysics and optical description chemically active plasma cylynder plasmaoptical discharge of magnetron type. Stage 4:The synthesis of nanolayers with the set properties for help prototyping of automatic control of processs and plasmadinamic system will bulid on. Description of the got coverage. Stage 5:The work of recommendation in relation to development and creation of ionic-plasma devices of new generation for guided syntesis nanofilms of metals fnd other dinary connection s with
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